Low-cost, fast prototyping method of fabrication of the microreactor devices in soda-lime glass

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Characterization of masking layers for deep wet etching of glass in an improved HF/HCl solution

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Engineering, Materials Engineering, Materials Science +13

Method for fabrication of microfluidic systems in glass

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Engineering, Bioengineering, Materials Engineering +16

A new masking technology for deep glass etching and its microfluidic application

Minqiang Bu, Tracy Melvin, G J Ensell et al. · Sensors and Actuators A Physical · 2004 · 168 citations

Engineering, Materials Engineering, Biomems +15

The introduction of powder blasting for sensor and microsystem applications

E. Belloy, S. Thurre, E. Walckiers et al. · Sensors and Actuators A Physical · 2000 · 162 citations · Full text

Engineering, Materials Engineering, Materials Science +11