Chalcogen doping of silicon via intense femtosecond-laser irradiation

Optical Processes in Semiconductors

J. I. Pánkové, D. A. Kiewit · Journal of The Electrochemical Society · 1972 · 4.6K citations

Engineering, Materials Engineering, Materials Science +14

Microstructuring of silicon with femtosecond laser pulses

Tsing-Hua Her, Richard Finlay, Claudia Wu et al. · Applied Physics Letters · 1998 · 807 citations

Natural Sciences, Materials Science, Physics +17

Near-unity below-band-gap absorption by microstructured silicon

Chengbin Wu, Catherine H. Crouch, Li Zhao et al. · Applied Physics Letters · 2001 · 511 citations

Engineering, Materials Engineering, Materials Science +17

Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon

Catherine H. Crouch, James E. Carey, Jeffrey M. Warrender et al. · Applied Physics Letters · 2004 · 401 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Supersaturated substitutional alloys formed by ion implantation and pulsed laser annealing of group-III and group-V dopants in silicon

C. W. White, S. R. Wilson, B. R. Appleton et al. · Journal of Applied Physics · 1980 · 353 citations

Engineering, Materials Engineering, Materials Science +17