Concepedia

Tungsten films produced by selective deposition onto silicon wafers

Y. Pauleau, Ph. Lami, A. Tissier, R. Pantel, J.C. Oberlin

Thin Solid Films · 1986 · 25 citations · 20 references

DOI

Concepts

References

20

Thin Films—Interdiffusion and Reactions

J. M. Poate, K. N. Tu, Jean-Claude Mayor et al. · Journal of The Electrochemical Society · 1979 · 1.7K citations

, , +9

Selective Low Pressure Chemical Vapor Deposition of Tungsten

E. K. Broadbent, Chuck Ramiller · Journal of The Electrochemical Society · 1984 · 220 citations

, , +12

Kinetics of Tungsten Deposition by the Reaction of  WF 6 and Hydrogen

W. A. Bryant · Journal of The Electrochemical Society · 1978 · 75 citations

, , +16

Structure of Selective Low Pressure Chemically Vapor‐Deposited Films of Tungsten

M. L. Green, R. Lévy · Journal of The Electrochemical Society · 1985 · 71 citations

, , +13

Refractory metal silicides for VLSI applications

A. K. Sinha · Journal of Vacuum Science and Technology · 1981 · 70 citations

, , +14