Ph. Lami

Kinetics and Mechanism of Selective Tungsten Deposition by LPCVD

Y. Pauleau, Ph. Lami · Journal of The Electrochemical Society · 1985 · 49 citations

Materials Engineering, Materials Science, Chemical Engineering +13

Tungsten films produced by selective deposition onto silicon wafers

Y. Pauleau, Ph. Lami, A. Tissier et al. · Thin Solid Films · 1986 · 25 citations

Materials Science, Engineering, Surface Science +6

The influence of an aluminum overlayer on the interaction of tungsten films with silicon substrates

Y. Pauleau, F. C. Dassapa, Ph. Lami et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 22 citations

Engineering, Tungsten Films, Silicon Substrates +18

Silicide formation in metal/Si structures and diffusion barrier properties of CVD tungsten films

Y. Pauleau, F. C. Dassapa, Ph. Lami et al. · Journal of materials research/Pratt's guide to venture capital sources · 1989 · 20 citations

Materials Science, Materials Engineering, Ii-vi Semiconductor +12

Evaluation of the Selective Tungsten Deposition Process for VLSI Circuit Applications

Ph. Lami, Y. Pauleau · Journal of The Electrochemical Society · 1988 · 12 citations

Engineering, Tungsten Films, Thin Film Process Technology +19