Concepedia

Publication | Closed Access

Photo-enhanced chemical wet etching of GaN

DOI

38

Citations

13

References

2002

Year

C.H. Ko, Yan‐Kuin Su, Shoou‐Jinn Chang, W.H. Lan, J. B. Webb, Ming-Lung Tu, Y. T. Cherng
Materials Science and Engineering B

References

YearCitations

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