Concepedia

Silicon nitride films deposited from SiH2Cl2NH3 by low pressure chemical vapor deposition: kinetics, thermodynamics, composition and structure

S.-L. Zhang, J.-T. Wang, Wayne D. Kaplan, Mikael Östling

Thin Solid Films · 1992 · 28 citations · 15 references

DOI

References

15

Physics of Semiconductor Devices

Geoffrey Pridham · Electronics and Power · 1970 · 4K citations

, , +6

JANAF thermochemical tables

Frederick D. Rossini · The Journal of Chemical Thermodynamics · 1972 · 1.9K citations

, , +3

Thermochemical properties of inorganic substances

H. A. Skinner · The Journal of Chemical Thermodynamics · 1974 · 1.8K citations

, , +6

Thermochemical properties of inorganic substances (Supplement)

Materials Chemistry · 1978 · 454 citations

, , +4

Optical Properties of Silicon Nitride

Herbert R. Philipp · Journal of The Electrochemical Society · 1973 · 452 citations

, , +14