Concepedia

J.-T. Wang

JW

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Publications

3

Citations

53

H-Index

3

Active since

1992

Affiliations

Fudan University(Current)

J.-T. Wang is an author at Fudan University specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

1992–2001

3

Publications

3

Silicon nitride films deposited from SiH2Cl2NH3 by low pressure chemical vapor deposition: kinetics, thermodynamics, composition and structure

S.-L. Zhang, J.-T. Wang, Wayne D. Kaplan et al. · Thin Solid Films · 1992 · 28 citations

Low Dielectric Constant SiO2:C,F Films Prepared from Si(OC2H5)4/C4F8/Ar by Plasma-Enhanced CVD

Shi‐Jin Ding, D. W. Zhang, J.-T. Wang et al. · Chemical Vapor Deposition · 2001 · 15 citations

, , +16

Thermodynamics of diamond film deposition at low pressure from chlorinated precursors

Z.-J. Liu, Dong Zhang, Ying Wan et al. · Applied Physics A · 1999 · 10 citations

, , +7

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