Fluorocarbon polymer thin films prepared by three different types of r.f. magnetron sputtering systems

Plasma etching—A discussion of mechanisms

J. W. Coburn, Harold F. Winters · Journal of Vacuum Science and Technology · 1979 · 601 citations

Natural Sciences, Chemistry, Materials Science +15

RF sputtering of polymers and its potential application

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Plasma polymer films rf sputtered from PTFE under various argon pressures

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Natural Sciences, Materials Engineering, Materials Science +14

Rf magnetron sputtering of polytetrafluoroethylene under various conditions

Hynek Biederman, Michael Zeuner, Jan Zalman et al. · Thin Solid Films · 2001 · 75 citations

Natural Sciences, Materials Engineering, Materials Science +10

Fabrication of PTFE thin films by dual catalytic chemical vapor deposition method

Hiroaki Yasuoka, Masahiro Yoshida, Ken Sugita et al. · Thin Solid Films · 2007 · 35 citations

Natural Sciences, Materials Engineering, Materials Science +10