Concepedia
Journal of Materials Science · 2003 · 17 citations · 18 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistryMetallic MaterialsThin FilmsAlloysMetal MaterialsMetalsCopper DepositionCopper MetallizationCopper MetallurgyMetal Thin FilmsMetallization
18
Effect of texture and grain structure on electromigration in Al-0.5%Cu thin films
Shefali Vaidya, A. K. Sinha · Thin Solid Films · 1981 · 354 citations
Natural Sciences, Materials Engineering, Materials Science +12
Texture development in polycrystalline thin films
Carl V. Thompson, R. Carel · Materials Science and Engineering B · 1995 · 333 citations
Natural Sciences, Materials Engineering, Materials Science +13
Copper metallization for ULSL and beyond
S. P. Murarka, Steven W. Hymes · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 1995 · 260 citations
Natural Sciences, Electrical Engineering, Materials Science +17
Oxidation and protection in copper and copper alloy thin films
Jian Li, J. W. Mayer, E. G. Colgan · Journal of Applied Physics · 1991 · 257 citations
Natural Sciences, Materials Engineering, Materials Science +17
Advanced multilayer metallization schemes with copper as interconnection metal
S. P. Murarka, R.J. Gutmann, Alain E. Kaloyeros et al. · Thin Solid Films · 1993 · 246 citations