Integrated micro-plasmas in silicon operating in helium

Microplasmas and applications

K. Becker, Karl H. Schoenbach, J. G. Eden · Journal of Physics D Applied Physics · 2006 · 895 citations

Engineering, Non-equilibrium Plasmas, Microscopy +16

Microhollow cathode discharges

Karl H. Schoenbach, R. Verhappen, T. Tessnow et al. · Applied Physics Letters · 1996 · 276 citations

Electrical Engineering, Parallel Operation, Engineering +9

Microplasmas, an emerging field of low-temperature plasma science and technology

Rüdiger Foest, Martin Schmidt, K. Becker · International Journal of Mass Spectrometry · 2005 · 274 citations

Engineering, Physics, Microfabrication +7

Predicted properties of microhollow cathode discharges in xenon

L. C. Pitchford, K.H. Schoenbach · Applied Physics Letters · 2005 · 141 citations

Electrical Engineering, Engineering, Physics +10

Microplasma devices fabricated in silicon, ceramic, and metal/polymer structures: arrays, emitters and photodetectors

J. G. Eden, Sung‐Jin Park, N.P. Ostrom et al. · Journal of Physics D Applied Physics · 2003 · 112 citations

Optical Materials, Engineering, Ceramic Multilayer Sandwiches +22