Preparation of Nanocrystalline Silicon Quantum Dots by Pulsed Plasma Processes with High Deposition Rates

Katsuhiko Nishiguchi, Shohei Hara, Takeru Amano, Shigeo Hatatani, Shunri Oda

MRS Proceedings · 1999 · 18 citations · 11 references

Concepts

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