A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer

Takefumi Kanda, A. Makino, Tomohisa Ono, Koichi Suzumori, Takeshi Morita, Minoru Kurosawa

Sensors and Actuators A Physical · 2005 · 135 citations · 11 references

DOIFull text

Open access

Concepts

References

11