A cylindrical shaped micro ultrasonic motor utilizing PZT thin film (1.4 mm in diameter and 5.0 mm long stator transducer)

Preparation of Lead Zirconate Titanate Thin Film by Hydrothermal Method

Katsuhiko Shimomura, Takaaki Tsurumi, Yoko Ohba et al. · Japanese Journal of Applied Physics · 1991 · 195 citations

Natural Sciences, Materials Engineering, Materials Science +15

A cylindrical micro ultrasonic motor using PZT thin film deposited by single process hydrothermal method (/spl phi/2.4 mm, L=10 mm stator transducer)

Takeshi Morita, Minoru Kurosawa, Toshiro Higuchi · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 1998 · 105 citations

Natural Sciences, Materials Science, Mechanical Engineering +17

Single Process to Deposit Lead Zirconate Titanate (PZT) Thin Film by a Hydrothermal Method

Takeshi Morita, Takefumi Kanda, Yutaka Yamagata et al. · Japanese Journal of Applied Physics · 1997 · 94 citations

Natural Sciences, Materials Engineering, Materials Science +7

Cylindrical Micro Ultrasonic Motor Utilizing Bulk Lead Zirconate Titanate (PZT)

Takeshi Morita, Minoru Kurosawa, Toshiro Higuchi · Japanese Journal of Applied Physics · 1999 · 69 citations

Engineering, Electrical Engineering, Mechanical Engineering +16

Piezoelectric micromotors for microrobots

Anita M. Flynn, Lee S. Tavrow, Stephen F. Bart et al. · IEEE Symposium on Ultrasonics · 2002 · 42 citations

Engineering, Mechanical Engineering, Robotics Engineering +15