Publication | Closed Access
A cylindrical shaped micro ultrasonic motor utilizing PZT thin film (1.4 mm in diameter and 5.0 mm long stator transducer)
128
Citations
5
References
2000
Year
Pzt Thin FilmEngineeringPower UltrasoundMicrofabricationMechanical EngineeringTransducer PrinciplePiezoelectricityMicroactuatorUltrasoundMicromachined Ultrasonic Transducer
| Year | Citations | |
|---|---|---|
Page 1
Page 1