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An ultrasonic micromotor using a bending cylindrical transducer based on PZT thin film

Pzt Thin FilmEngineeringMicrofabricationMechanical EngineeringTransducer PrincipleMechanical SystemsBending Cylindrical TransducerPiezoelectricityBiomedical EngineeringMicroactuatorUltrasoundUltrasonic MicromotorMicromachined Ultrasonic Transducer