An ultrasonic micromotor using a bending cylindrical transducer based on PZT thin film

IC-processed electrostatic micromotors

Long-Shen Fan, Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 486 citations

Electrical Engineering, Engineering, Soft Robotics +10

Preparation of Lead Zirconate Titanate Thin Film by Hydrothermal Method

Katsuhiko Shimomura, Takaaki Tsurumi, Yoko Ohba et al. · Japanese Journal of Applied Physics · 1991 · 195 citations

Materials Science, Engineering, Corrosion +10

An ultrasonic motor using bending vibrations of a short cylinder

Minoru Kurosawa, Kentaro Nakamura, Takeo Okamoto et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 1989 · 132 citations

Elastic Object, Aeroacoustics, Vibrations +13

Harmonic electrostatic motors

William S. Trimmer, R. Jebens · Sensors and Actuators · 1989 · 86 citations

Electrical Engineering, Electric Machine, Engineering +8

Hybrid ultrasonic micromachined motors

G.-A. Racine, R. Luthier, Ν. F. de Rooij · 2002 · 46 citations · Full text

Engineering, Elastic Force Motors, Mechanical Engineering +19