Publication | Closed Access
A 10.5-in.-diagonal SXGA active-matrix display
20
Citations
6
References
1998
Year
Electrical EngineeringHigh ResolutionEngineeringAdvanced Packaging (Semiconductors)Display TechnologyComputer EngineeringSix-mask ProcessSemiconductor Device FabricationIntegrated CircuitsOpen Gate LinesElectronic PackagingMatrix AnalysisMicroelectronicsAdvanced Display Technology
A 157-dot-per-inch, 262K-color, 10.5-in.-diagonal, 1280 × 1024 (SXGA) display has been fabricated using a six-mask process with Cu or Al-alloy thin-film gates. The combination of high resolution and gray-scale accuracy has been shown to render color images and text with paperlike legibility. The low-resistivity gate metallization and trilayer-type TFTs with a channel length of 6-8 µm were fabricated with a six-mask process which is extendible to larger, higher-resolution displays. A combination of double-sided driving and active line repair was used so that open gate lines or data lines did not result in visible line defects. A flexible drive-electronics system was developed to address the display and characterize its performance under different drive conditions.
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