A MEMS-based low pressure, light gas density and binary concentration sensor

Coriolis mass flowmeters: Overview of the current state of the art and latest research

Martin Anklin, Wolfgang Drahm, Alfred Rieder · Flow Measurement and Instrumentation · 2006 · 167 citations

Engineering, Measurement, Calibration +9

A silicon resonant sensor structure for Coriolis mass-flow measurements

Peter Enoksson, Göran Stemme, E. Stemme · Journal of Microelectromechanical Systems · 1997 · 118 citations

Coriolis Force, Engineering, Measurement +12

Alumina MEMS platform for impulse semiconductor and IR optic gas sensors

Alexey Vasiliev, R. G. Pavelko, S. Yu. Gogish-Klushin et al. · Sensors and Actuators B Chemical · 2008 · 77 citations

Electrical Engineering, Engineering, Alumina Mems Platform +11

Theory of errors in Coriolis flowmeter readings due to compressibility of the fluid being metered

J. Hemp, Jože Kutin · Flow Measurement and Instrumentation · 2006 · 51 citations

Compressible Flow, Engineering, Measurement +7

Deep trench plasma etching of single crystal silicon using SF6/O2 gas mixtures

C. D’Emic, K. Chan, J. M. Blum · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 45 citations

Materials Science, Materials Engineering, Single Crystal Silicon +15