Concepedia
Microsystem Technologies · 2008 · 44 citations · 2 references
EngineeringManufacturing EngineeringMaterials EngineeringMicroelectromechanical SystemsMicrofabricationPolymer EngineeringMems FabricationMicrofabrication MaterialsMicrofabrication ProcessesMicromachiningSurface MicromachiningEmbossingHot EmbossingPrecision Microfabrication
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Fabrication of Mold Master for Spiral Microcoil Utilizing X-Ray Lithography of Synchrotron Radiation
Harutaka Mekaru, Shinji Kusumi, Noriaki Sato et al. · Japanese Journal of Applied Physics · 2004 · 24 citations
Engineering, Materials Engineering, Materials Science +17
Precise Micro Pattern Replication by Hot Embossing
Kazuyoshi Idei, Harutaka Mekaru, Hiroaki Takeda et al. · JSME International Journal Series A · 2006 · 12 citations · Full text
Engineering, Manufacturing Engineering, Materials Science +14