Concepedia

The residual stress in TiN films deposited onto cemented carbide by high-rate reactive sputtering

A.J. Perry, Mark Jagner, W.D. Sproul, P.J. Rudnik

Surface and Coatings Technology · 1989 · 38 citations · 16 references

DOI

Concepts

References

16

Microstructure modification of TiN by ion bombardment during reactive sputter deposition

I. Petrov, Lars Hultman, Ulf Helmersson et al. · Thin Solid Films · 1989 · 327 citations

, , +16

Internal stress and adherence of titanium nitride coatings

D.S. Rickerby · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 121 citations

, , +17

Variations in the reflectance of TiN, ZrN and HfN

A.J. Perry, M. Georgson, W.D. Sproul · Thin Solid Films · 1988 · 89 citations

, , +9

States of residual stress both in films and in their substrates

A.J. Perry, L. Chollet · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 81 citations

, , +17

Microstructure evolution in TiN films reactively sputter deposited on multiphase substrates

Ulf Helmersson, J.‐E. Sundgren, J. E. Greene · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 81 citations

, , +17