To suppress dark current of high temperatureβ-SiC/Si optoelectronic devices with porous silicon substrate

Abstract

The suppression of high temperature dark current in a β-SiC/Si optoelectronic device with a porous substrate has been studied. A pin structure was used to demonstrate the applicability. Experimental results show a 12-fold improvement in optical gain at 200°C operating temperature for the sample prepared on a porous silicon substrate compared to the sample prepared on a Si substrate. The improvement is attributed to the suppression of dark current by the high resistivity and flexibility of the porous substrate.