Characterization of implantation and annealing of Zn-implanted InP by Raman spectrometry

Abstract

First- and second-order Raman scattering by Zn-implanted InP is investigated in order to determine critical fluences needed for a complete disturbance of the lattice and recovery temperature during thermal annealing. Disorder-activated first-order acoustical scattering and second-order optical scattering are shown to be highly sensitive probes.