Microelectronics Reliability · 1999 · 172 citations · 77 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesThin FilmsDevice CharacterizationDevice ReliabilityMaterial DegradationMaterial Degradation AssessmentSemiconductor ReliabilitySurface DegradationOxide BreakdownReliability Degradation MechanismsReliability PredictionThin Oxide LayersWear-out Mechanisms
77