Publication | Closed Access
Sputter deposition of gallium nitride films using a GaAs target
74
Citations
21
References
1998
Year
Electrical EngineeringEngineeringApplied PhysicsGallium Nitride FilmsAluminum Gallium NitrideGallium OxideThin FilmsCategoryiii-v SemiconductorOptoelectronicsCompound Semiconductor
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