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Multi-component high-K gate dielectrics for the silicon industry

DOI

124

Citations

7

References

2001

Year

L. Manchanda, M.D. Morris, M.L Green, R. B. van Dover, F. Klemens, T. Sorsch, P. J. Silvėrman, G. D. Wilk, B. Busch, Shyam Aravamudhan
Microelectronic Engineering

References

YearCitations

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