Sensors and Actuators A Physical · 2001 · 21 citations · 12 references
EngineeringMechanical EngineeringMechatronics EngineeringMicroelectromechanical SystemsMicrofabricationLaser Material ProcessingLaser Surface ProcessingMachiningMicrofabrication ProcessesMicromachiningTransducer TechnologyLaser Beam MachiningLaser MicromachiningMiniaturized TransducersPrecision MicrofabricationTransducer Fabrication
12
Micromachining Using Excimer Lasers
Hans Kurt Tönshoff, D. Hesse, J. Mommsen · CIRP Annals · 1993 · 56 citations
Engineering, Manufacturing Engineering, Microfabrication +10
Excimer laser micromachining and replication of 3D optical surfaces
Anika Braun, K. Zimmer, B. Hößelbarth et al. · Applied Surface Science · 1998 · 53 citations
Engineering, Manufacturing Engineering, Materials Science +14