Concepedia

Micromachining Using Excimer Lasers

Hans Kurt Tönshoff, D. Hesse, J. Mommsen

CIRP Annals · 1993 · 56 citations · 1 references

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Concepts

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Concepts

EngineeringManufacturing EngineeringMicrofabricationOpticsPhotonicsLaser Material ProcessingLaser PhysicsLaser Surface ProcessingMicrofabrication ProcessesMicromachiningExcimer LasersLaser MicromachiningLasers

References

1

<title>Gas assisted microstructuring of ceramic materials irradiated with excimer lasers</title>

Hans K. Toenshoff, D. Hesse, Olaf Gedrat · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 10 citations

Engineering, Materials Engineering, Materials Science +17