Replication of sub-40nm gap nanoelectrodes over an 8-in. substrate by nanoimprint lithography - Concepedia

Concepedia

Publication | Closed Access

Replication of sub-40nm gap nanoelectrodes over an 8-in. substrate by nanoimprint lithography

16

Citations

8

References

2005

Year

J. Tallal, D. Peyrade, F. Lazzarino, K. Berton, C. Perret, Michael J. Gordon, C. Gourgon, Patrick Schiavone

Microelectronic Engineering

Materials ScienceEngineeringNanoimprint LithographyBeam LithographyMicrofabricationNanotechnologyNanoelectronicsNanomaterialsApplied PhysicsPrinted ElectronicsNanolithographyNanofabricationNanocomputingNanometrologySub-40nm Gap NanoelectrodesNanolithography Method

References

	Year	Citations

Page 1

Page 1