6
Publications
192
Citations
6
H-Index
2004
Active since
J. Tallal is an author at Laboratoire des Technologies de la Microélectronique specializing in materials science, engineering, and applied physics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsNanomaterialsNanotechnologyMicrofabrication3D PrintingNanofabricationNanolithographyFlexible Electronics
Publications per year
2004–2009
6
6
Jean‐Marie Verilhac, M. Benwadih, Anne-Laure Seiler et al. · Organic Electronics · 2009 · 62 citations · Full text
AFM characterization of anti-sticking layers used in nanoimprint
J. Tallal, Michael J. Gordon, K. Berton et al. · Microelectronic Engineering · 2006 · 48 citations
Uniformity across 200 mm silicon wafers printed by nanoimprint lithography
C. Gourgon, J. Tallal, S. Landis et al. · Journal of Physics D Applied Physics · 2004 · 40 citations
4 inch lift-off process by trilayer nanoimprint lithography
J. Tallal, K. Berton, Michael J. Gordon et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 13 citations
Materials Science, Residual Resist Thickness, Engineering +15
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