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Natural SciencesMaterials EngineeringPhysicsPlasma PhysicsSurface EngineeringSurface ScienceMagnetized PlasmaPlasma ConfinementPlasma FundamentalsPlasma Surface TreatmentPlasma-surface InteractionsPlasma-wall InteractionsMagnetic Field GradientsMagnetic Field HomogeneityPlasma DepositionPlasma-enhanced DepositionRe-deposition
11
Ion implantation into metals and cabrides
G. Dearnaley, N. E. W. Hartley · Thin Solid Films · 1978 · 126 citations
Natural Sciences, Materials Engineering, Materials Science +10
Plasma-Immersion Ion Implantation
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