Concepedia

Plasma-Immersion Ion Implantation

J. V. Mantese, I.G. Brown, N.W. Cheung, George Collins

MRS Bulletin · 1996 · 113 citations · 52 references

DOI

References

52

Plasma source ion-implantation technique for surface modification of materials

J. R. Conrad, Joachim Radtke, R.A. Dodd et al. · Journal of Applied Physics · 1987 · 1.1K citations

, , +16

Cross Sections and Swarm Coefficients for Nitrogen Ions and Neutrals in N2 and Argon Ions and Neutrals in Ar for Energies from 0.1 eV to 10 keV

A. V. Phelps · Journal of Physical and Chemical Reference Data · 1991 · 596 citations

, , +13

Sheath thickness and potential profiles of ion-matrix sheaths for cylindrical and spherical electrodes

J. R. Conrad · Journal of Applied Physics · 1987 · 321 citations · Full text

, , +8

Model of plasma immersion ion implantation

M. A. Lieberman · Journal of Applied Physics · 1989 · 292 citations

, , +7

Microstructure, corrosion and tribological behaviour of plasma immersion ion-implanted austenitic stainless steel

M. Samandi, B.A. Shedden, David Smith et al. · Surface and Coatings Technology · 1993 · 251 citations

, , +12