Thin Solid Films · 2006 · 45 citations · 37 references
Natural SciencesChemistryMaterials ScienceMaterials ChemistrySurface ChemistrySurface ScienceAtomic Layer DepositionCoatingsNanostructured SurfacesSurface Chemistry Of SolidsSurface PhysicsSurface SpectroscopyAtomic Layer Deposition KineticsAtomic Layer Deposition PrecursorsNitride Thin FilmsNitrides DepositionNitrides Thin FilmsSurface Chemistry Of SilicaTitanium Nitride Coatings
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