Microcrystalline silicon thin films for sensor applications

The electrical properties of polycrystalline silicon films

John Y. W. Seto · Journal of Applied Physics · 1975 · 2.9K citations

Engineering, Electrical Engineering, Materials Science +17

Raman scattering from small particle size polycrystalline silicon

Zafar Iqbal, S. Vepřek, A.P. Webb et al. · Solid State Communications · 1981 · 326 citations

Natural Sciences, Materials Science, Physics +12

Properties of polycrystalline silicon prepared by chemical transport in hydrogen plasma at temperatures between 80 and 400 degrees C

S. Vepřek, Zafar Iqbal, H. Oswald et al. · Journal of Physics C Solid State Physics · 1981 · 152 citations

Natural Sciences, Materials Science, Physics +17

Structural Study on Amorphous-Microcrystalline Mixed-Phase Si:H Films

Akihisa Matsuda, Toshihiko Yoshida, Satoshi Yamasaki et al. · Japanese Journal of Applied Physics · 1981 · 47 citations

Natural Sciences, Materials Engineering, Materials Science +17

Low-cost pressure/force transducer with silicon thin film strain gauges

W. Germer, Wolfgang Todt · Sensors and Actuators · 1983 · 36 citations

Engineering, Materials Engineering, Materials Science +14