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Low-cost pressure/force transducer with silicon thin film strain gauges

W. Germer, Wolfgang Todt

Sensors and Actuators · 1983 · 36 citations · 1 references

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Concepts

EngineeringMaterials EngineeringMaterials ScienceInstrumentationSensorsThin FilmsForce SensingForce SensorsMechanical SensorsPressure SensorsTactile SensingTransducer TechnologyPressure TransducersSemiconductor Strain GaugesStrain Gauge Force SensorsStrain Gauge Pressure SensorsThin-film Strain Gauges

References

1

The electrical properties of polycrystalline silicon films

John Y. W. Seto · Journal of Applied Physics · 1975 · 2.9K citations

Engineering, Electrical Engineering, Materials Science +17