Thin Solid Films · 1999 · 30 citations · 9 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsLaser Material ProcessingLaser Surface ProcessingSemiconductor Crystal GrowthSemiconductor Device MaterialsSilicon MaterialsThin-film DepositionPulsed Laser DepositionPulsed Laser Deposition CoatingsSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Carbide Crystal Growth
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