Publication | Closed Access
Optimization of AlN thin layers on diamond substrates for high frequency SAW resonators
58
Citations
9
References
2011
Year
Materials ScienceMaterials EngineeringDiamond-like CarbonAluminium NitrideEngineeringNanoelectronicsAcoustic MetamaterialApplied PhysicsDiamond SubstratesMicroelectronicsAln Thin Layers
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