Materials Letters · 2011 · 58 citations · 9 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMicrofabricationThin FilmsMicrofabrication MaterialsMicrostructure ControlAluminum Nitride DevicesResonator DesignThin Oxide Layers
9
Growth of AlN piezoelectric film on diamond for high-frequency surface acoustic wave devices
M. Benetti, Domenico Cannatà, F. Di Pictrantonio et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2005 · 110 citations
Natural Sciences, Materials Engineering, Materials Science +17