5 GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography

Abstract

Very high frequency surface acoustic wave (SAW) devices based on AlN/diamond layered structures were fabricated by direct writing using e-beam lithography on the nucleation side of chemical vapor deposition diamond. The interdigital transducers made in aluminum with resolutions down to 500nm were patterned on AlN/diamond layered structure with an adapted technological process. Experimental results show that the Rayleigh wave and the higher modes are generated. The fundamental frequency around 5GHz was obtained for this layered structure SAW device and agrees well with calculated results from dispersion curves of propagation velocity and electromechanical coupling coefficient.