Statistics
Publications
40
Citations
1.3K
H-Index
22
Active since
1979
M. Benetti is an author at Institute of Acoustics and Sensors "Orso Mario Corbino" specializing in engineering, materials science, and applied physics.
Publications per year
1979–2023
40
40
Growth of AlN piezoelectric film on diamond for high-frequency surface acoustic wave devices
M. Benetti, Domenico Cannatà, F. Di Pictrantonio et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2005 · 108 citations
Materials Engineering, Materials Science, Diamond-like Carbon +15
F. Di Pietrantonio, M. Benetti, Domenico Cannatà et al. · Sensors and Actuators B Chemical · 2012 · 70 citations
Materials Science, Chemical Engineering, Polymer Chemistry +8
1–5 of 40