Monolithic two-section GaInAsP/InP active-optical-resonator devices formed by reactive ion etching

Abstract

Narrow, high-aspect-ratio grooves formed by reactive ion etching (RIE) are shown to be useful as partially transmissive mirrors for coupled active laser-detector, laser-modulator, and laser-etalon two-section monolithic devices. Results emphasize control of the longitudinal mode spectrum by active etalon action.