Publication | Closed Access
Metallic microgripper with SU-8 adaptor as end-effectors for heterogeneous micro/nano assembly applications
30
Citations
6
References
2004
Year
Materials ScienceElectrical EngineeringEngineeringMicrofabricationNanotechnologyNanomaterialsNanomanufacturingSu-8 AdaptorNano Electro Mechanical SystemMicroscale SystemNanofabricationElectronic PackagingMicroelectronicsMetallic MicrogripperNanoarchitectonics
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