Concepedia

The limits of CD metrology

Bryan J. Rice, Heidi B. Cao, Michael Grumski, Jeanette Roberts

Microelectronic Engineering · 2006 · 20 citations · 1 references

DOI

Concepts

References

1

New atomic force microscope method for critical dimension metrology

Takafumi Morimoto, Toru Shinaki, Yukio Kembo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 12 citations

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