Takafumi Morimoto

A novel AFM method for sidewall measurement of high-aspect ratio patterns

Masahiro Watanabe, Shuichi Baba, Toshihiko Nakata et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 21 citations

Thin Probes, Engineering, Cnt Probes +25

Atomic Force Microscopy for High Aspect Ratio Structure Metrology

Takafumi Morimoto, Hiroshi Kuroda, Yasushi Minomoto et al. · Japanese Journal of Applied Physics · 2002 · 20 citations

Atomic Force Microscopy, Engineering, Microscopy +16

New AFM imaging for observing a high aspect structure

Sumio Hosaka, Takafumi Morimoto, Hiroshi Kuroda et al. · Applied Surface Science · 2002 · 15 citations

Super-resolution Imaging, High Resolution, Engineering +6

Proposal for new atomic force microscopy (AFM) imaging for a high aspect structure (digital probing mode AFM)

Sumio Hosaka, Takafumi Morimoto, Kouji Kuroda et al. · Microelectronic Engineering · 2001 · 15 citations

Engineering, Electron Microscopy, Physics +11

New atomic force microscope method for critical dimension metrology

Takafumi Morimoto, Toru Shinaki, Yukio Kembo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 12 citations