Concepedia

Shuichi Baba

SB

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Publications

2

Citations

32

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2

Active since

2006

Affiliations

Hitachi (Japan)(Current)

Shuichi Baba is an author at Hitachi (Japan) specializing in instrumentation, area measurement, and nanodevices.

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Publications per year

2006–2008

2

Publications

2

A novel AFM method for sidewall measurement of high-aspect ratio patterns

Masahiro Watanabe, Shuichi Baba, Toshihiko Nakata et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 21 citations

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An advanced AFM sensor for high-aspect ratio pattern profile in-line measurement

Masahiro Watanabe, Shuichi Baba, Toshihiko Nakata et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 11 citations

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