Concepedia

Yukio Kembo

YK

3

Publications

47

Citations

3

H-Index

2002

Active since

Affiliations

Hitachi (Japan)(Current)

Gunma University

Yukio Kembo is an author at Hitachi (Japan) specializing in microscopy, engineering, and microstructure.

Top concepts

Publications per year

2002–2003

3

Publications

3

Atomic Force Microscopy for High Aspect Ratio Structure Metrology

Takafumi Morimoto, Hiroshi Kuroda, Yasushi Minomoto et al. · Japanese Journal of Applied Physics · 2002 · 20 citations

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New AFM imaging for observing a high aspect structure

Sumio Hosaka, Takafumi Morimoto, Hiroshi Kuroda et al. · Applied Surface Science · 2002 · 15 citations

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New atomic force microscope method for critical dimension metrology

Takafumi Morimoto, Toru Shinaki, Yukio Kembo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 12 citations

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