Concepedia
1
Publications
12
Citations
H-Index
2003
Active since
Affiliations
Hitachi (Japan)(Current)
Toru Shinaki is an author at Hitachi (Japan).
Publications per year
2003–2003
New atomic force microscope method for critical dimension metrology
Takafumi Morimoto, Toru Shinaki, Yukio Kembo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 12 citations
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