Finite element method investigation into nanoimprinting of aluminum/polyimide bi-layer substrates

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Nanoimprint lithography

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 1.7K citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

Sub-10 nm imprint lithography and applications

Stephen Y. Chou, Peter R. Krauss, Wei Zhang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 1.1K citations

Engineering, Electrical Engineering, Materials Science +14

Impact of polymer film thickness and cavity size on polymer flow during embossing: toward process design rules for nanoimprint lithography

Harry D. Rowland, Amy Cha-Tien Sun, Peter Schunk et al. · Journal of Micromechanics and Microengineering · 2005 · 186 citations

Engineering, Manufacturing Engineering, Materials Science +17

Simulation and experimental study of polymer deformation in nanoimprint lithography

Yoshihiko Hirai, Takaaki Konishi, Takashi Yoshikawa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 173 citations

Engineering, Materials Engineering, Materials Science +17