Plasma etching and patterning of CVD diamond at <100°C for microelectronics applications

New diamond science and technology

Materials & Design (1980-2015) · 1991 · 311 citations

Natural Sciences, Materials Engineering, Materials Science +7

Reactive ion etching of diamond

Gurtej Sandhu, Whei-Lee Chu · Applied Physics Letters · 1989 · 108 citations

Natural Sciences, Materials Engineering, Materials Science +16

Ion-beam-assisted etching of diamond

N. N. Efremow, M. W. Geis, D. C. Flanders et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 103 citations

Engineering, Materials Engineering, Materials Science +11

Etching of diamond with argon and oxygen ion beams

Timothy J. Whetten, Angela A. Armstead, Thomas A. Grzybowski et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 83 citations

Natural Sciences, Materials Science, Physics +12

Role of microstructure on the oxidation behavior of microwave plasma synthesized diamond and diamond-like carbon films

R. Nimmagadda, A. Joshi, W. L. Hsu · Journal of materials research/Pratt's guide to venture capital sources · 1990 · 54 citations

Natural Sciences, Materials Engineering, Materials Science +11