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Surface adhesion and demolding force dependence on resist composition in ultraviolet nanoimprint lithography

Materials ScienceEngineeringBeam LithographyElectron-beam LithographyMicrofabricationNanotechnologySurface ScienceApplied PhysicsPrinted ElectronicsSurface AdhesionNanolithographyNanofabricationForce DependenceUltraviolet Nanoimprint Lithography3D PrintingNanolithography Method