Low dielectric fluorinated amorphous carbon thin films grown from C6F6 and Ar plasma - Concepedia

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Low dielectric fluorinated amorphous carbon thin films grown from C6F6 and Ar plasma

61

Citations

24

References

2000

Year

Jeong W. Yi, Young H. Lee, Bakhtier Farouk

Thin Solid Films

Materials ScienceEngineeringCarbon-based MaterialLow DielectricApplied PhysicsAr PlasmaThin FilmsCarbon-based FilmsThin Film Processing

References

	Year	Citations

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