Fabrication of sharp silicon tips employing anisotropic wet etching and reactive ion etching

Anisotropic etching of silicon

K.E. Bean · IEEE Transactions on Electron Devices · 1978 · 796 citations

Engineering, Materials Engineering, Materials Science +15

Field-emitter arrays for vacuum microelectronics

C.A. Spindt, C.E. Holland, A. Rosengreen et al. · IEEE Transactions on Electron Devices · 1991 · 360 citations

Engineering, Electrical Engineering, Materials Science +12

Vacuum microelectronics: what's new and exciting

Takao Utsumi · IEEE Transactions on Electron Devices · 1991 · 282 citations

Engineering, Electrical Engineering, Materials Science +10

Formation of silicon tips with <1 nm radius

R. B. Marcus, T. S. Ravi, T. J. Gmitter et al. · Applied Physics Letters · 1990 · 261 citations

Engineering, Materials Engineering, Materials Science +14

Recent progress in field emitter array development for high performance applications

D. Temple · Materials Science and Engineering R Reports · 1999 · 230 citations

Engineering, Electrical Engineering, Materials Science +14