Publication | Closed Access
A virtual metrology system for semiconductor manufacturing
117
Citations
12
References
2009
Year
Geometric ModelingVirtual ManufacturingEngineeringVirtual EngineeringIndustrial EngineeringDigital ManufacturingVirtual Metrology SystemSystems EngineeringComputer-aided DesignMetrology
| Year | Citations | |
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1984 | 23.8K | |
1986 | 21K | |
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1995 | 1.9K | |
2005 | 228 | |
2005 | 97 | |
2006 | 76 | |
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2006 | 57 |
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