Concepedia

Control relevant issues in semiconductor manufacturing: Overview with some new results

An‐Jhih Su, Jyh‐Cheng Jeng, Hsiao‐Ping Huang, Cheng‐Ching Yu, Shih-Yu Hung, Ching‐Kong Chao

Control Engineering Practice · 2006 · 59 citations · 30 references

Concepts

EngineeringIndustrial EngineeringManufacturing EngineeringManufacturing ProcessesManufacturing SystemsProduction ControlController DesignIn-process ControlInventory Control PoliciesManufacturing ConstraintsProduction ConstraintsQuality Control In ManufacturingFeedback Control In Production SystemsManufacturingManufacturing Lead Time ControlProcess Variation AnalysisProcess Yield ControlProduction Control SystemsProduction Control Under Uncertainty

References

30

Robust process control.

G.S. Virk · Chemical Engineering Science · 1990 · 3.2K citations

Monitoring batch processes using multiway principal component analysis

Paul Nomikos, John F. MacGregor · AIChE Journal · 1994 · 1.5K citations

Engineering, Chemical Engineering, Process Control +16

Theory of thermal stresses

Journal of the Franklin Institute · 1960 · 383 citations

Engineering, Mechanical Engineering, Physics +11

Theory of Thermoelasticity With Applications

J. L. Nowinski, Bruno A. Boley · Journal of Applied Mechanics · 1980 · 339 citations · Full text

Engineering, Mechanical Engineering, Physics +17

Analysis, monitoring and fault diagnosis of batch processes using multiblock and multiway PLS

Theodora Kourti, Paul Nomikos, John F. MacGregor · Journal of Process Control · 1995 · 338 citations

Engineering, Chemical Engineering, Industrial Engineering +15